Free Standing GaN Substrates
Saint-Gobain Lumilog leverages its unique and proprietary process to manufacture epi-ready free-standing GaN wafers in both 2-inch and 100 mm diameter. GaN free-standing wafers are n-type doped GaN and single side polished. Lumilog GaN is non-patterned which maximizes die processing yields. GaN crystal quality is identical for both 2-inch and 100mm free-standing GaN to accelerate scale-up & industrialization.
GaN White series shows the perfect combination of electrical conductivity and transparency for energy efficient and durable LEDs.
GaN Blue series is designed for Laser applications, where its controlled miscut and improved mechanical properties significantly improve the fab yields.
GaN is now Green. GaN Green series has been developped for power electronics applications. Its reduced electrical resistivity combined with its excellent crystal quality make GaN Green series the substrate of choice for next generation energy efficient power devices.
|White series||Blue Series||Green series|
|Total Thickness Variation – TTV (µm)||≤ 25||≤ 50||≤ 25||≤ 25||≤ 50|
|SORI (µm)||≤ 30||≤ 100||≤ 30||≤ 30||≤ 100|
||Bow| (µm)||≤ 10||≤ 40||≤ 10||≤ 10||≤ 40|
|Ga-face Surface Finish||Epiready|
|Miscut Variation||≤ 0.3||≤ 0.5||≤ 0.2||≤ 0.5||≤ 0.3|
|XRD (0002) FWHM (arcsec)||110-120||110-120||70-80||70-80||70-80|
|Average TD (cm-2)||
|~ 8x106||~ 5x106||~ 5x106||~ 5x106|
|n Carrier Concentration (cm-3)||2x1018||2x1018||2x1018||3x1018||3x1018|
|Resistivity (mΩ.cm)||≤ 20||≤ 20||≤ 20||≤ 10||≤ 10|
The purity level of Lumilog GaN free-standing wafers is Silicon Fab approved. Lumilog GaN is also compliant with EU directive 2015/863.
Single wafer shipping box (polypropylene). Double-bagged, vacuum-sealed in class-ISO 6 cleanroom environment. Ready to go directly in cleanroom
In order to improve uniformity and epi-process yields, miscut and miscut range can be adjusted upon request. We continue to develop consistent higher crystal quality GaN substrates and design substrates that meet both application and epi-process requirements.